Optimization Scheme of SU-8 Photoresist Micro-Nano Processing
Optimization Scheme of SU-8 Photoresist Micro-Nano Processing The Shortcomings of Traditional SU-8 Photoresist Processing and the Advantages of Ultrasonic Spray Coating Technology In high-end manufacturing fields such as micro/nano manufacturing, MEMS devices, microfluidic chips, and precision sensing elements, SU-8 negative photoresist, with its high resolution, high aspect ratio, excellent mechanical properties, and chemical stability, has become a core material for thick-film microstructure processing. Currently, traditional SU-8 photoresist processing [...]

