TFT Glass Coating Photoresist Process Solution

TFT glass ultrasonic spraying photoresist process solution

In the precision manufacturing process of new display panels, the coating treatment on the edges and sidewalls of TFT glass substrates is a key process to ensure panel yield and product stability. As the display industry evolves toward high resolution, ultra-thinness and high reliability, traditional coating processes can no longer meet the precise and uniform coating preparation requirements for glass edges. With the technical advantages of high precision, high uniformity and low loss, ultrasonic spraying technology has become an optimal solution for photoresist coating on TFT glass.

This process is mainly applied to the surface coating operation of TFT glass substrates after grinding. The front and back edges and sidewalls of TFT glass will have subtle texture differences and micro concave-convex structures after cutting and grinding. Uneven or incomplete photoresist coating will easily cause edge defects, circuit deviation and substrate corrosion in subsequent lithography and etching processes, which directly affect the imaging quality and service life of display panels. Therefore, the industry has put forward strict standardized requirements for the coating thickness, uniformity and adhesion of this process.

The core technical index of the process is to carry out automatic ultrasonic spraying on the front, back edges and sidewalls of polished TFT glass, and precisely control the photoresist coating thickness within the range of 1.6-2μm. Based on the high-frequency ultrasonic vibration principle, ultrasonic spraying atomizes liquid photoresist into uniform micro-scale droplets. It avoids the defects of traditional spraying such as coarse droplets, severe sputtering and uneven accumulation. The droplets can evenly adhere to the flat edges and vertical sidewalls of the glass, perfectly adapting to the coating requirements of special-shaped glass corners.

Compared with traditional spraying, spin coating and flow coating, ultrasonic spraying has outstanding advantages in TFT glass photoresist coating. It realizes accurate micron-level film thickness control with stable thickness of 1.6-2μm and tiny thickness error. The coating has excellent uniformity without local accumulation, missing coating, pinholes and orange peel defects, covering all edges and sidewalls of the glass. Meanwhile, it features high material utilization and strong droplet targeting, which reduces photoresist waste and production cost. It is widely compatible with TFT glass substrates of different sizes and thicknesses, suitable for large-scale automatic production lines.

This process effectively solves the core pain points of edge protection and lithography forming in the post-process of TFT glass. Through the precise and controllable preparation of photoresist coating, it greatly improves the stability and accuracy of subsequent lithography processes, reduces panel defect rates, and provides reliable process support for the precision and high-quality production of high-end display panels. It is widely applicable to the processing of small and medium-sized touch displays, high-end liquid crystal displays and flexible display supporting glass substrates.

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

If you have any technical questions, customization demands, or procurement inquiries about ultrasonic atomization nozzles, feel free to contact our professional sales and technical team for detailed parameters, customized solutions, and industry application support.
Email: market2@cheersonic.com