SEMICONDUCTOR COATING

The ultrasonic coating system can use advanced layering technology to precisely control the flow rate, coating speed and deposition amount. Low-speed spray forming defines an atomizing spray as a precise, controllable pattern, avoiding excessive spraying when producing very thin and uniform layers. It turns out that direct spraying using ultrasonic technology is a reliable and effective way to deposit photoresist on 3D microstructures, thereby reducing equipment failures caused by excessive metal exposure to etchant.

Ultrasonic spray systems have proven to be suitable for a variety of applications that require uniform, repeatable photoresist or polyimide film coatings. Cheersonic’s coating system can control thicknesses from sub-micron to more than 100 microns, and can coat any shape or size. It is a feasible alternative to other coating technologies such as spin coating and traditional spray coating.

Cheersonic’s non-blocking ultrasonic coating technology is known for its ultra-thin micron-layer coatings of functional and protective materials. The ultrasonic vibration of the nozzle effectively dispersed the particles in the suspension and produced a very uniform particle dispersion in the film layer, while the conductive particles did not settle out of the suspension.

ULTRASONIC COATING TECHNOLOGIES FOR SEMICONDUCTOR

Ultrasonic spray of photoresist for MEMS wafers and other substrates with varying topographies
  • Uniform thin film coverage of various surface profiles
  • High uniformity and uniformity
  • Non-contact spraying
  • Micro-flow spraying, multiple liquid feeding schemes
  • High speed control accuracy
  • High liquid utilization
  • Ability to deposit thin single micron layers with high uniformity
  • Repeatable proven spray process

EQUIPMENT SOLUTIONS

UEC1000 Ultrasonic Photoresist Spray Machine

Economical Photoresist Coater
Work Area*: 200 x 200mm

UEC1000
UEC4000E Ultrasonic Photoresist Coating Machine

Economical Photoresist Coater
Work Area*: 300 x 300mm

UEC4000E
UEC4000L Benchtop Ultrasonic Photoresist Coater

Benchtop Photoresist Coater
Work Area*:400 x 400mm

UEC4000L
UEC6000S Ultrasonic Photoresist Coating Equipment

Photoresist Coater
Work Area*: 500 x 500mm

UEC6000S
UEC6000L Ultrasonic Photoresist Spray Equipment

Photoresist Coater
Work Area*: 650 x 650mm

UEC6000L
MSU1000 Fitted Megasonic Cleaning System

Fitted Megasonic Cleaning System
Megasonic Cleaning

MSU1000
 MSN1000 Sprinkler Megasonic Cleaning Nozzle

Megasonic Cleaning Nozzle
Megasonic Cleaning

MSN1000
MSP1000 Batch Type Megasonic Plate

Batch Type Megasonic Plate
Megasonic Cleaning

MSP1000

OUR EXPERTISES

Cheersonic offers innovative and customized solutions that will meet your needs. Discover how our expertise, combined to yours, can speed up your production.

Robotics solutions

Cheersonic designs robotic solutions for companies seeking to improve the automation of their transformation process.

Custom manufacturing

Cheersonic presents the techniques used to design equipment that meets the specific needs of a particular process.

Mechanical and electrical engineering

Cheersonic demonstrates its design and engineering expertise through the work of its skilled engineers.

DO YOU NEED ULTRASONIC COATING?

CONTACT US

To reach our anytime via email please fill out the form below with your request and a company representative will reply to you. To find your local CHEERSONIC representative to connect directly click your region in the contact drop down menu.

Contact CHEERSONIC For immediate assistance please contact us the corporate headquarters during business hours at 6:00 am – 22:00 pm.

  • Tel: 0571-87910406

  • Mobile: +86 13588732518
  • Email: Market2@cheersonic.com
  • Add: 11-13 Chuangye Road, Changkou, Fuyang, Hangzhou, Zhejiang, China

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