Photoresist Deposition for Microelectronics
Photoresist Deposition for Microelectronics Photoresist Deposition onto Unconventional Substrates for Microelectronics ManufacturingSpin coating technology faces major limitations when applied to oversized, curved and specially shaped substrates in microelectronic fabrication. As an alternative, ultrasonic spray coating technology is capable of forming highly uniform and conformable photoresist films on the full surface and microstructures of such unconventional substrates. It facilitates high-precision photolithographic processing for cutting-edge optical, electronic, [...]

