Ultrasonic Spray Coating of Positive Photoresist

Ultrasonic Spray Coating of Positive Photoresist – Cheersonic

Using an ultrasonic sprayer to spray positive photoresist with a viscosity of 50 cps onto 2-inch square ceramic wafers is an efficient and advanced manufacturing technology. This technology achieves uniform coating of the positive photoresist, providing a precise pattern foundation for subsequent photolithography steps. The following is a detailed discussion of this technology:

1. Working Principle of the Ultrasonic Sprayer:
– An ultrasonic sprayer uses high-frequency sound waves to generate tiny droplets, evenly spraying the photoresist onto the surface of the ceramic wafer. This equipment can also precisely control the thickness and uniformity of the coating by controlling the spray speed and flow rate.
– The core component of the ultrasonic sprayer is the ultrasonic atomizing nozzle, which converts the photoresist into fine, controllable mist particles. This method significantly improves the uniformity of the photoresist coating and reduces material loss and environmental pollution.

2. Characteristics and Applications of Photoresist:
– Photoresist, also known as photoresist, is a substance whose solubility changes when exposed to light. During the photolithography process, it is an essential material for transferring the pattern from the mask to the substrate.
– Photoresist is composed of a photoinitiator, resin, monomer, solvent, and other additives. When the photoresist is irradiated with light of a specific wavelength, a chemical reaction occurs in the exposed portion, and the desired fine pattern is formed through the subsequent development process.

3. Advantages of Ultrasonic Spraying Technology:
– Ultrasonic spraying of photoresist is more uniform than traditional methods such as spin coating, eliminating the generation of bubbles and particles, thereby improving the quality and yield of photolithography.
– Ultrasonic spraying systems enable high-precision coating thickness control, helping to reduce material costs and improve production efficiency.
– This technology is suitable for a variety of substrates and photoresists, including silicon wafers, glass, and ceramics, giving it broad application prospects in fields such as integrated circuits and liquid crystal displays.
4. Technical Features of Ultrasonic Spraying Equipment:
– Ultrasonic spraying equipment, such as the CHEERSONIC, provides uniform and efficient thin-film coating, achieving coating uniformity exceeding 95% and a solution conversion rate of 95%, significantly outperforming traditional two-fluid spraying. The equipment is typically equipped with an XYZ three-axis servo motion system, a full-color touchscreen control, and a high-precision laboratory-type syringe pump, enabling fast and stable spraying operations.

In summary, using an ultrasonic dispenser to spray a 50 cps positive photoresist onto a 2-inch square ceramic wafer is a cutting-edge photolithography technology. This technique not only improves the quality of the photoresist coating but also helps save materials and reduce costs. As the technology continues to develop, it is expected to gain wider application in semiconductor and other precision manufacturing fields.

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

Chinese Website: Cheersonic Provides Professional Coating Solutions