Current Situation of Lithography in China
Current Situation of Lithography in China – Semiconductor Coating – Cheersonic
In the process of chip production, tens of thousands of circuits need to be engraved on a small 7nm chip with optical materials, and this auxiliary optical material is photoresist.
In the field of photoresist, materials are mainly divided into four types, namely g-line, i-line, KrF, ArF photoresist. short. The resolution of photoresist will change with the change of light frequency. The basic evolution route is: g line (436nm) → i line (365nm) → KrF (248nm) → ArF (193nm) → F2 (157nm) → EUV (<13.5nm).
ArF photoresist is the most difficult to manufacture, which is also an indispensable raw material in the 14nm/7nm chip manufacturing process. The technology of the chip is also graded. The technology level of tablet computers and automobile chips is not high. The real difficulty lies in the 7nm chip.
Mobile phone chips of this process not only require advanced EVU lithography machines to produce, but also require high-end photoresist as auxiliary materials and a large number of chip raw materials to successfully produce 7nm chips. The lithography machine is monopolized by companies in the United States and the Netherlands. Now the EVU lithography machine is in a state of disconnection to China. The EVU lithography machine purchased by SMIC for 1.2 billion has not yet arrived; chip raw materials, although some domestic Raw materials are produced independently, but raw materials such as silicon wafers, photomasks, electronic gases, polishing materials, sputtering targets, photoresists and wet electronic chemicals are completely dependent on imports.
In addition, although the most advanced EVU lithography machine has been cut off, the supply of the DVU lithography machine with relatively low process technology has not been cut off, and the DVU lithography machine can also be used for 7nm process chips. Achieving the fabrication of a 7nm chip. This means that in 2022, the existing lithography machine technology may be able to mass-produce 7nm chips in advance.
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