MEMS MOS Gas Sensor Coating Types and Fabrication Processes Explained The core sensing performance of MEMS MOS (Metal-Oxide-Semiconductor) gas sensors, including gas selectivity, response sensitivity, temperature and humidity stability, and lifespan, depends primarily on the material system and fabrication process of the sensing coating. Unlike traditional macroscopic gas sensors, MEMS devices possess characteristics of microscale, low power consumption, integration, and wafer-level mass production. Their coatings must meet stringent [...]