Ultrasonic Thin Film Deposition Coater

Ultrasonic thin film deposition coater is mainly developed for enterprises, universities and research institutes who are in contact with ultrasonic spraying equipment for the first time. The entire equipment has a simple and elegant structure and complete functions. It mainly includes XY double-axis precision motion modules, and is equipped with a comprehensive trajectory editing system to realize the spraying function of any two-dimensional plane graphics, such as rectangles, circles, triangles or curves. It can be equipped with any of CHEERSONIC’s ultrasonic nozzles, as well as a precision constant-flow syringe pump, digital display carrier gas system, and optional ultrasonic dispersion liquid supply system, vacuum adsorption heating substrate and other functions. The entire device can also be used in a fume hood.

Advantage

4 times advantage: Ultrasonic thin film deposition coater can achieve up to 4 times the utilization rate of traditional spraying, effectively reducing material costs
Nano-scale film thickness: The thinnest film thickness that can be prepared by ultrasonic thin film deposition coater can reach tens of nanometers, and the uniformity is highly consistent
Air-free atomization: Atomization is generated by ultrasonic high-frequency vibration, without the participation of air pressure, effectively avoiding the impact of high air pressure on the substrate

General configuration

Viscosity and solid content: usually the viscosity is less than or equal to 30cps, and the solid content of the suspension is not more than 20-30%
Liquid supply equipment: precision syringe pump + biological grade injector, liquid supply accuracy 0.1μL/min
Dry film thickness: 20nm-100μm (related to solution and substrate)
Input voltage: 220V±10%, 50-60Hz
Solution conversion rate: ≥95%, the utilization rate is several times that of traditional two-fluid air pressure nozzles
Atomized particle size: the average value is 15-45μm, mainly depends on the frequency of the nozzle, the higher the frequency, the smaller the particles
Nozzle frequency: can be equipped with 30-200KHz various nozzle systems

Optional

Ultrasonic dispersion liquid supply system: It can continuously disperse and stir the nanoparticles during the spraying process, effectively reduce the precipitation of the spraying liquid, and greatly improve the uniformity of the film layer
Heating and drying platform: using aviation aluminum porous platform or precision microporous ceramic platform, precise temperature control 200 ℃
Vacuum adsorption platform: Equipped with multiple vacuum generators, which can be controlled in different regions, and can accurately adsorb the film substrate without deformation.
Nozzle alignment device: use laser alignment.
We can also customize other configurations you need!