Ultrasonic Spraying of Alternating SiO₂/TiO₂ Films
The Application Value of Ultrasonic Spraying Technology in DOE Film Preparation
In the field of precision optical component manufacturing, film performance directly determines the core indicators of the device. Ultrasonic spraying technology, with its advantages of uniform atomization and dense coating, has become a key technical path for the preparation of DOE (Diffractive Optical Element) films. The preparation of alternating SiO₂/TiO₂ films and PFPE functional films has achieved technological breakthroughs in semiconductor lithography and medical imaging, respectively.
Semiconductor lithography equipment places stringent requirements on the light transmittance of optical components. The 193nm deep ultraviolet band, as the core working wavelength for lithography, directly affects imaging accuracy and process stability. Traditional spraying techniques are prone to problems such as uneven film thickness and particle agglomeration, leading to significant attenuation of light transmittance. Ultrasonic spraying technology, however, atomizes SiO₂ and TiO₂ precursor solutions into nanoscale droplets through high-frequency vibration. Combined with precise airflow control, this allows the two materials to be deposited alternately to form a uniform film. The low refractive index of SiO₂ and the high refractive index of TiO₂ form optical complementarity. By controlling the film period and thickness, the reflection loss of deep ultraviolet light is effectively reduced, ultimately achieving a transmittance of ≥99.2%. This film not only has excellent light transmittance but also good mechanical stability, able to withstand temperature fluctuations and chemical corrosion during photolithography, fully meeting the requirements of high-precision photolithography equipment.
In the field of medical imaging, DOEs, as core optical components, often face the challenge of bodily fluid contamination. Contaminant adhesion leads to blurred images and increased equipment failure rates. PFPE (perfluoropolyether) hydrophobic films prepared by ultrasonic spraying technology provide an effective solution to this problem. This technology optimizes spraying parameters to form a uniform and dense coating of PFPE molecules on the DOE surface. Its unique molecular structure endows the film with extremely strong hydrophobicity, with a contact angle of ≥110°. This highly hydrophobic surface effectively repels bodily fluids such as blood and tissue fluid, reducing contaminant adhesion. Meanwhile, this film exhibits excellent biocompatibility and sterilization resistance, maintaining stable hydrophobic properties even after repeated sterilization. This extends the lifespan of the DOE (Distributed Oxide Array) and reduces the maintenance costs of medical equipment, ensuring the clarity and reliability of medical imaging.
The successful application of ultrasonic spraying technology in the preparation of two DOE film layers demonstrates its flexibility and superiority in precision film manufacturing. Whether for optical films pursuing ultimate light transmittance or protective coatings emphasizing functional properties, this technology can achieve performance breakthroughs through process optimization, providing strong support for the development of high-end manufacturing fields such as semiconductors and medical devices.
About Cheersonic
Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.
Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.
Chinese Website: Cheersonic Provides Professional Coating Solutions
