Spray Photoresist Onto Wafers

How to spray photoresist onto wafers or devices?

Photoresist processing (coating, spraying) technology and patterning are the most repetitive steps in semiconductor manufacturing and are essential.

Photoresist processing technology is widely used to meet many micro and nano technology applications and products in different markets, such as advanced packaging, MEMS, MOEMS and sensors, microfluidics, RF equipment, photonics, and so on. All these application fields have brought new challenges to the design and manufacture of semiconductor devices.