Photoresist Coater

Photoresist Coater – Spray Polyimide Photoresist – Cheersonic

The ultrasonic spray system software has been proven to be used in the semiconductor industry through several years of scientific research and application, and can produce uniformly distributed photolithography or polyimide thin film coatings. Ultrasonic precision coating system can handle thickness from sub-micron to more than 100μm, and can spray all shapes or sizes, it is an economical development alternative to spin coating and traditional coating technology applications.

Polyimide and photoresist technology coatings are commonly found in MEMS, lenses, microfluidic devices, microelectronics and filters. Ultrasonic atomization automatic spraying equipment can spray coatings on substrates such as silicon wafers, glass, ceramics and metals, and even 3D uneven substrates can be sprayed to prepare uniform coatings.

The Ultrasonic Precision Coating System is a simple and economical process for photoresist and polyimide coatings. Ultrasonic high-precision spraying system can use high-precision liquid system software technology to carry out precise control of liquid flow rate, spray rate and coating thickness. Ultrasonic high-precision photoresist atomization spraying technology can not only avoid overspraying, but also produce very thin and uniform coatings.