Technical Features of Silicon Micromechanical Sensors
Technical Features of Silicon Micromechanical Sensors Silicon micromechanical sensor is a new type of sensor developed based on silicon micromachining technology. Its main performance characteristics are as follows: 1 Miniaturization and integration Silicon micromechanical sensors use micron-scale micromachining technology to manufacture micron-sized sensor sensitive elements. This kind of device is easy to integrate, so that two-dimensional or three-dimensional sensor arrays can be formed, and integrated large-scale integrated circuit, [...]

