Silicon Micromechanical Sensors
Silicon Micromechanical Sensors With the emergence of silicon micromachining technology, silicon micromechanical sensors have emerged. Compared with classic sensors, this new type of sensor has the advantages of small size, easy integration, low cost, low power consumption, fast speed and high reliability. and high precision. Further integrating this sensor with an integrated circuit can form a powerful smart sensor, and smart sensors are the main direction of sensor [...]

