Introduction to MEMS Micromirrors
Introduction to MEMS Micromirrors Micro Electro Mechanical Systems (MEMS) technology is a manufacturing technique for microstructures at the nanometer to micrometer scale. It originates from the semiconductor and microelectronics process system, integrating various modern processing methods such as photolithography, epitaxy, thin film deposition, oxidation, diffusion, ion implantation, sputtering, evaporation, etching, slicing, and packaging. The core is to manufacture complex three-dimensional shapes through microfabrication, essentially achieving the miniaturization integration [...]

