Megasonic Cleaning Equipment

Megasonic wave, as the name suggests, is a type of ultra-frequency ultrasonic wave, so Megasonic cleaning is a type of ultra-high frequency ultrasonic cleaning. Like ultrasonic cleaning, megasonic cleaning machines use transducers to convert the sound energy of power ultrasound into mechanical vibration, radiating ultrasound into the cleaning solution, causing micro bubbles in the liquid to maintain vibration under the action of megasonic waves, thereby damaging the adsorption of pollutants on the surface of the substrate (cleaning part), causing fatigue damage and peeling of the pollutant layer, and achieving the purpose of cleaning. This application mainly utilizes the cavitation effect of ultrasound. The frequency of megasound cleaning is higher, which is a megahertz level ultra-high frequency ultrasound. Compared to the cavitation effect of low-frequency ultrasound, the megasonic cavitation effect can remove smaller particles and significantly reduce damage to the substrate.

The traditional megasonic cleaning equipment mainly includes spray type megasonic cleaning equipment and slot type megasonic cleaning machine. The advantage of spray type megaacoustic cleaning is that it can directly focus the megaacoustic energy on the surface of the substrate, and the transfer efficiency of sound energy is relatively high. However, due to the small acoustic radiation area of the spray type, the cleaning speed is relatively slow, and the spray type will require a larger flow rate of cleaning solution, resulting in a significant waste of cleaning solution. The advantage of slot type megaacoustic cleaning is that the area of the megaacoustic transducer is large, so it can radiate the sound field in a large area and have high cleaning efficiency. However, the disadvantage is that the distribution of the megaacoustic field in the water tank is uneven, and the sound intensity becomes weaker as the distance from the transducer increases, and the transmission efficiency of sound energy is lower.

On the basis of spray type and slot type megasonic cleaning, the adhesive type megasonic cleaning equipment proposes a more optimized solution: it directly transmits megasonic energy to the surface of the substrate in a relatively large area, with very high transmission efficiency and sound field uniformity. It improves cleaning efficiency and greatly reduces waste of cleaning solution, making it more suitable for cleaning flat substrates such as semiconductor wafers.

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

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