Photoresist Spray System

Ultrasonic Photoresist Spray System is uniquely suite to photoresist deposition onto MEMs with high aspect ratios, providing more uniform coatings than conventional spin process.

Wafer sizes range from 50mm diameter to 300mm diameter. Coating thicknesses range from 0.5 microns to 10 microns. Coating thickness and uniformity can be certified at the customers request.

Photoresist Spray System - Photoresist Deposition onto MEMs

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

Chinese Website: Cheersonic Provides Professional Coating Solutions