Photoresist Spraying Process

Photoresist Spraying Process – Photoresist Spraying – Cheersonic

In semiconductor manufacturing, precision optical devices, and other fields, the photoresist spraying process is a crucial step determining product quality and performance. With continuous technological advancements, the precision requirements for photoresist spraying are becoming increasingly stringent, especially the technical specifications of adjustable adhesive viscosity (300-2000), a thickness of up to 20µm, and uniformity controlled within 5%. Traditional spraying equipment struggles to meet these demands. Ultrasonic spraying machines, with their innovative technology, have become the ideal choice for overcoming these challenges.

The viscosity of the photoresist directly affects its atomization and coating effect. When the adhesive viscosity varies within the 300-2000 range, traditional spraying equipment often struggles to maintain spraying stability at different viscosities. Ultrasonic spraying machines, through their unique design and intelligent control system, achieve precise processing of photoresist of varying viscosities. The equipment’s built-in precision stirring and heating device pre-treats the photoresist, bringing its viscosity to an optimal spraying state. Simultaneously, the ultrasonic nozzle automatically adjusts the ultrasonic frequency and amplitude according to the set viscosity, ensuring uniform atomization of the photoresist into tiny particles within a viscosity range of 300-2000, laying the foundation for subsequent precise spraying.

In terms of thickness control, the ultrasonic sprayer exhibits superior precision. For a 20µm photoresist coating thickness requirement, the equipment precisely controls spraying time, nozzle movement speed, and solution flow rate through a real-time monitoring and feedback mechanism. Guided by precise airflow, the photoresist droplets ejected from the nozzle are uniformly deposited on the substrate surface, with each spray precisely superimposed, ultimately achieving the target thickness of 20µm with minimal error.

The stringent requirement of uniformity control within 5% further highlights the technological advantages of the ultrasonic sprayer. Traditional spraying methods struggle to guarantee coating uniformity due to uneven atomized particle size and unstable spraying pressure. Ultrasonic spraying machines utilize the uniform atomization effect generated by high-frequency ultrasound to spray photoresist particles onto the substrate at a consistent speed and direction. Simultaneously, the equipment’s multi-axis motion control system ensures smooth nozzle movement during spraying, preventing uneven coating caused by vibration. Professional testing shows that photoresist coatings produced using ultrasonic spraying machines maintain a thickness uniformity consistently within 5%, effectively guaranteeing the precision and reliability of the photolithography process.

In practical applications, the excellent performance of ultrasonic spraying machines has been fully validated. In the chip manufacturing field, facing complex wafer surface photoresist coating, this equipment can accurately meet the coating requirements for photoresist with viscosities ranging from 300 to 2000, producing uniform and smooth 20µm photoresist coatings, helping chips achieve higher integration and performance. In the production of precision optical lenses, uniform photoresist coatings ensure consistency in subsequent etching processes, significantly improving lens imaging quality.

Chifei continuously upgrades the technology of its ultrasonic spraying machines, optimizing the equipment’s intelligence and automation. By incorporating more advanced sensors and control systems, the equipment is more adept at handling the complex technical requirements of photoresist spraying, providing reliable process support for high-end manufacturing industries such as semiconductors and optics, and driving the industry towards higher precision and higher efficiency.、

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

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