Ultrasonic Spraying of SiO ₂/TiO ₂ Alternating Coating

Ultrasonic Spraying of SiO ₂/TiO ₂ Alternating Coating – Cheersonic

In the field of precision optical component manufacturing, the performance of the film layer directly determines the core indicators of the device. Ultrasonic spraying technology, with its advantages of uniform atomization and dense coating, has become a key technical path for the preparation of special film layers for DOE (diffractive optical components). The preparation results of SiO ₂/TiO ₂ alternating film layer and PFPE functional film have achieved technological breakthroughs in the fields of semiconductor lithography and medical imaging, respectively.

Semiconductor lithography equipment imposes strict requirements on the transmittance performance of optical components. The 193nm deep ultraviolet band, as the core working wavelength of lithography, directly affects the imaging accuracy and process stability in terms of transmittance. Traditional spraying techniques are prone to problems such as uneven film thickness and particle agglomeration, resulting in significant attenuation of light transmittance. Ultrasonic spraying technology atomizes SiO ₂ and TiO ₂ precursor liquids into nano-sized droplets through high-frequency vibration, and with precise airflow control, alternately deposits the two materials to form a uniform film layer. The low refractive index of SiO ₂ and the high refractive index of TiO ₂ form optical complementarity. By adjusting the film period and thickness, the reflection loss of deep ultraviolet light is effectively reduced, ultimately achieving a transmittance of ≥ 99.2%. This film layer not only has excellent light transmission performance, but also has good mechanical stability, which can withstand temperature fluctuations and chemical environment erosion during the photolithography process, fully meeting the requirements of high-precision lithography equipment.

In the field of medical imaging, DOE, as a core optical component, often faces the problem of fluid contamination. The attachment of pollutants can lead to blurred imaging and increased equipment failure rates. The PFPE (perfluoropolyether) hydrophobic film prepared by ultrasonic spraying technology provides an effective solution to this problem. This technology optimizes the spraying parameters to form a uniform and dense coating of PFPE molecules on the surface of DOE. Its unique molecular structure endows the film layer with strong hydrophobicity, and the contact angle can reach ≥ 110 °. This highly hydrophobic surface can effectively repel body fluids such as blood and tissue fluids, reducing the attachment of pollutants. At the same time, the film has good biocompatibility and disinfection resistance, and can maintain stable hydrophobic effect after repeated disinfection, which not only extends the service life of DOE but also reduces the maintenance cost of medical equipment, providing a guarantee for the clarity and reliability of medical imaging.

The successful application of ultrasonic spraying technology in the preparation of two types of DOE film layers demonstrates its flexibility and superiority in precision film manufacturing. Whether it is optical film layers that pursue ultimate transparency or protective coatings that emphasize functional characteristics, this technology can achieve performance breakthroughs through process optimization, providing strong support for the development of high-end manufacturing fields such as semiconductors and healthcare.

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.

Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

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