Spray Coating Photoresist

Ultrasonic Spray Coating Photoresist – Ultrasonic Nozzle – Cheersonic

Photoresist coatings can be used in the production of electronic devices and microelectromechanical (MEMs) devices. Photoresists are generally polymer materials that are enhanced by exposure to light (ie, by cross-linking negative photoresist materials) or solubilized (positive photoresist materials), so , Light is used to pattern the photoresist coating on the substrate, the technique is called photolithography. Then, usually when preparing to etch and/or apply other functional materials to the substrate, the resist-coated substrate is exposed to a specific solvent or solution (called a developer) to remove unwanted resistance. Etching agent material.

Ultrasonic spraying is a simple, economical and repeatable process for photoresist and polyimide coatings. Cheersonic ultrasonic coating system can use simple layering technology to precisely control flow rate, coating speed and deposition volume. Low-speed spray molding defines atomized spray as a precise and controllable pattern to avoid excessive spray when producing a very thin and uniform layer.

Spray Coating Photoresist - Ultrasonic Nozzle - Cheersonic

Photoresist Deposition for Microelectronics – Beyond Wafers

Traditional spin-coating has long dominated photoresist deposition for semiconductor wafer processing, yet it faces inherent limitations in advanced microelectronic manufacturing involving non-standard substrates. For large flat panel displays, oversized optical lenses, as well as curved and freeform optical components, spin-coating technology is no longer practical due to its strict requirements for substrate flatness and size. In response to this industry pain point, ultrasonic spray deposition technology has emerged as a superior alternative for photoresist coating.
This advanced deposition method is capable of forming highly uniform photoresist films on the full surface of diverse substrates and complex micro-nano structural features. It effectively eliminates the common edge bead phenomenon plaguing spin-coating processes, optimizing the flatness and uniformity of coating films in all regions. With this technological advantage, the fabrication of anti-reflective coatings, diffractive optical structures and other core lithography processes can be completed stably. The process completely avoids liquid pooling, streaks and other coating defects, greatly improving the yield and precision of optical and microelectronic component processing.

In the emerging fields of microfluidics, biosensors and flexible electronic manufacturing, spray-coated photoresist demonstrates more prominent comprehensive performance. It can form ultra-thin films with excellent uniformity and solvent resistance, while boasting outstanding substrate adhesion and high-precision pattern fidelity, meeting the stringent micro-processing requirements of flexible roll-to-roll films and metal foils. In addition, the technology features high material transfer efficiency and precise closed-loop automatic control systems. It significantly reduces photoresist solvent consumption and material waste, while ensuring stable and consistent thickness of dielectric and polymer films on every substrate. This not only cuts production costs but also improves the consistency and reliability of batch microelectronic product manufacturing.

About Cheersonic

Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.
The Company’s solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.

Cheersonic’s growth strategy is focused on leveraging its innovative technologies, proprietary know-how, unique talent and experience, and global reach to further develop thin film coating technologies that enable better outcomes for its customers’ products and processes. For further information, visit https://cheersonic-liquid.com/.