Wafer Oxidation
Wafer Oxidation Wafer Oxidation - Photoresist Spray System - Cheersonic The role of the oxidation process is to form a protective film on the wafer surface. It protects wafers from chemical impurities, prevents leakage currents from entering circuits, prevents diffusion during ion implantation, and prevents wafer slippage during etching. The first step of the oxidation process is to remove impurities and pollutants, and it is necessary to remove [...]

