Photoresist Spraying on IGBT Module Packages
Photoresist Spraying on IGBT Module Packages – Cheersonic
With the rapid development of industries such as new energy vehicles, rail transit, and industrial frequency converters, IGBTs, as core power semiconductor devices, have their module packaging process directly determining their voltage withstand capability, heat dissipation, insulation, and long-term operational stability. Photoresist spraying is a critical step in IGBT module packaging. Traditional spin coating, brush coating, and air pressure spraying methods are prone to uneven coating thickness, edge overflow, pinholes, bubbles, and significant material waste, failing to meet the requirements of high-end IGBT precision packaging. Cheersonic ultrasonic spray coating machines, with their ultrasonic atomization precision spraying technology, effectively solve the pain points of photoresist coating, becoming a highly efficient and reliable coating solution in the IGBT module packaging field.
In the IGBT module packaging process, photoresist is mainly used for insulating protective layers, circuit patterning, and passivation layer preparation, requiring extremely high standards for coating uniformity, adhesion, and thickness consistency. Traditional spraying methods suffer from unstable pressure, large atomized particles, low photoresist utilization, and contamination, affecting chip insulation performance and electrical safety. Cheersonic ultrasonic spraying machine utilizes high-frequency ultrasonic vibration to finely atomize the photoresist solution, forming micron-sized uniform droplets. Guided by low-pressure airflow, these droplets are stably deposited on the IGBT substrate, chip, and frame surface, without high-pressure impact throughout the process, thus preventing damage to precision semiconductor components.
The equipment can precisely control the spraying flow rate, atomization frequency, spraying distance, and movement speed, achieving precise control of photoresist coating thickness from nanometers to micrometers. The resulting coating is dense and uniform, free of pinholes and drips, with clear edge contours, significantly improving the insulation performance and temperature and moisture resistance of the IGBT module. Meanwhile, ultrasonic spraying achieves a material utilization rate of over 90%, saving significant amounts of photoresist consumables compared to traditional spraying, reducing production costs, minimizing waste liquid and materials, and meeting green production standards in semiconductor manufacturing.
For different IGBT packaging structures, Cheersonic ultrasonic spraying machines support customized spraying paths and tooling fixtures, adapting to various IGBT specifications such as single tubes, modules, and power units. They can achieve both precise localized spraying and uniform coating across the entire surface. The equipment boasts a high degree of automation, and with a motion control system, it enables continuous production line operation, ensuring strong spraying consistency and good repeatability, effectively reducing human error, improving production efficiency, and making it suitable for large-scale semiconductor packaging production lines.
In the power semiconductor industry, device miniaturization, high power, and high reliability are becoming development trends, continuously increasing the requirements for packaging process precision. Cheersonic ultrasonic spraying machines, with their advantages of precision atomization, low-pressure spraying, uniform coating, and high material utilization, are perfectly suited for multiple packaging processes in IGBT modules, including photoresist spraying, insulating coating, thermally conductive coating, and conformal coating. This helps companies optimize production processes, improve product yield, and enhance market competitiveness.
Cheersonic Ultrasonic has been deeply involved in the ultrasonic spraying field for many years, providing one-stop services including dedicated IGBT packaging spraying equipment, process debugging, and customized solutions. Its products are widely used in industries such as new energy, power electronics, rail transportation, and photovoltaic energy storage, providing stable and reliable precision spraying technology support for power semiconductor packaging manufacturing.
About Cheersonic
Cheersonic is the leading developer and manufacturer of ultrasonic coating systems for applying precise, thin film coatings to protect, strengthen or smooth surfaces on parts and components for the microelectronics/electronics, alternative energy, medical and industrial markets, including specialized glass applications in construction and automotive.
Our coating solutions are environmentally-friendly, efficient and highly reliable, and enable dramatic reductions in overspray, savings in raw material, water and energy usage and provide improved process repeatability, transfer efficiency, high uniformity and reduced emissions.
Chinese Website: Cheersonic Provides Professional Coating Solutions


